Device Description:
The magnetron sputtering vacuum coating machine is a vertical single-door unbalanced magnetron reactive sputtering coating machine. The film deposited by this device is improved in density, uniformity, purity, hardness and the like. Widely used in high-grade decorative and functional films in the fields of glass, ceramic plates, decorative panels and transportation aviation.
main feature:
1. The deposition rate is fast and the temperature rise is small, which can better suppress the phenomenon of ignition and target poisoning;
2. The high energy released by sputtering significantly increases the film density and adhesion;
3. touch screen + PLC, can achieve automatic control, automatic / manual switch at any time;
4. The coating chamber has a large volume, large loading capacity and high production efficiency.
5. The workpiece frame adopts a mobile car structure, and the sputtering target adopts a screw to move in parallel in the cavity body, and the product uniformity is good;
6. The whole machine is configured reasonably, the pumping speed is fast, the noise is small, and the energy consumption is low;
basic configuration:
1. The coating chamber, valves and pipes are made of stainless steel, vertical and single-opening structure, and the effective diameter of the vacuum chamber is from 1800x2400x520mm;
2. The vacuum system consists of a mechanical pump, a rotary vane pump, a Roots pump and a high vacuum oil diffusion pump or molecular pump with a cold trap;
3. The coating system uses 1~8 sets of cylindrical (planar) targets with 1~8 DC power supplies;
4. A low temperature water vapor trap can be used in the auxiliary pumping system;
5. the inflation system is controlled by 1~3 way gas flowmeter and flow control (display) instrument;
6. the electric control system sets the circuit overload, water, air and sound and light alarm device;
7. Control system (touch screen + PLC), display detailed parameters in real time, fully control the entire production process, and automatically store process parameters;
8. can be equipped with multiple sets of target sources according to customer requirements.
Technical Parameters: