Device Description:
It is mainly used for coating various types of film such as antireflection film, spectroscopic film, band pass film/cut film, high reflective film on glass lens, and can realize super-large film coating of 100-layer film, and can also satisfy the resin. It is coated with anti-reflection film of various colors, and is coated with reflective film and decorative film of red, yellow, blue, green, dry, and colorful colors on glass, acrylic, crystal and other materials.
main feature:
1. Configure the super large 坩埚 electron gun, the surface of the film material is flat and the evaporation distribution is uniform during the whole evaporation process;
2. The quartz crystal film thickness controller can be configured to realize the film forming speed and automatic control of the coating process;
3. Configure high-power ion source with good film thickness;
4. The president's structural design is reasonable and more in line with the process requirements. The vacuum system uses an oil-free system to ensure that the entire system works in an oil-free state;
5. The vacuum operating system realizes interlock protection, and the spread pump has the functions of water cutoff and power failure alarm.
6. Adopt touch screen and PLC automatic control to realize parameterized setting, real-time operation monitoring and fault intelligent diagnosis of the main components of the whole machine.
Main configuration:
1. The vacuum chamber adopts a vertical front door box structure, all stainless steel cabinets, and the inner cavity size is Φ800mm-Φ1800mm;
2. The vacuum system uses a molecular pump (diffusion pump), and the foreline pump uses an oil-free vacuum pump;
3. A set of water vapor low temperature trap is used as vacuum assisted pumping;
4. Workpiece frame: arched integral workpiece plate, or can be customized according to customer requirements;
5. coating system: with 1 ~ 2 sets of high-power e-type magnetic deflection 2700 electron gun and multi-point 坩埚, auxiliary coating system with Hall ion source;
6. baking: digital display automatic temperature control, temperature control accuracy ± 1.5 ° C;
7. Film thickness control: quartz crystal film thickness monitoring system can control the evaporation rate of electron gun, accurately control the thickness of the film layer, realize convenient switching by manual and automatic control; optical film thickness monitoring system, transmission or reflection light path, monitoring wavelength range 200~900mm ;
8. Control system: The vacuum control is controlled by a 10.4 inch color touch screen plus a PLC programmable controller.
Technical Parameters: